Optimization of Controlling Parameters of Porous Silicon Synthesis Using Taguchi Design of Experiment
Shivam Maurya, Sakti Prasanna Muduli, Suman Nayak, Paresh Kale
Abstract
Abstract Porous silicon (PS) with high porosity is used in energy storage, solar photovoltaics, and sensing applications. The anodization method is the most widely used fabrication method since it is easy and economical. However, the method has various interdependent controlling parameters to fabricate PS, such as wafer resistivity, current density, hydrofluoric acid concentration, and anodization time. The parameters need to be optimized for a particular application to achieve the optimum porosity with fewer accouterments and time. The optimization can be carried out using the Taguchi design of experiment, which is based on the fractional factorial orthogonal array (OA). Mean output parameter graph, Signal to noise ratio, and interaction plot help to decide the interdependency and the optimized parameter for the desired output. The optimization achieved is validated by the factorial design of experiments.