A review of material surface processing utilizing gas cluster ion beam technology
Zihao Lin, Xiangzhi Li, Guanglong Chen, Peilei Zhang, Yunjiu Cao, Li Ren, Huili Shao, Xinxin Zhao
Topics & Concepts
Cluster (spacecraft)Ion beamMaterials scienceBeam (structure)Surface (topology)Engineering physicsNanotechnologyComputer sciencePhysicsOpticsOperating systemMathematicsGeometryIon-surface interactions and analysisDiamond and Carbon-based Materials ResearchIntegrated Circuits and Semiconductor Failure Analysis