ALD growth of ZnO on p-Si and electrical characterization of ZnO/p-Si heterojunctions
Hogyoung Kim, Myeong Jun Jung, Seok Cheol Choi, Byung Joon Choi
Topics & Concepts
Materials scienceHeterojunctionAtomic layer depositionSaturation currentSaturation (graph theory)ZincLayer (electronics)Quantum tunnellingSiliconDepletion regionAnalytical Chemistry (journal)OptoelectronicsNanotechnologyVoltageMetallurgyChemistryPhysicsCombinatoricsQuantum mechanicsMathematicsChromatographyZnO doping and propertiesSemiconductor materials and devicesElectronic and Structural Properties of Oxides