The effect of magnetic field configuration on structural and mechanical properties of TiN coatings deposited by HiPIMS and dcMS
Anas Ghailane, Hicham Larhlimi, Youssef Tamraoui, M. Makha, Heinz Busch, Christian B. Fischer, Jones Alami
Topics & Concepts
High-power impulse magnetron sputteringMaterials scienceSputter depositionTitanium nitrideCavity magnetronTinMetallurgyComposite materialSputteringNitrideThin filmNanotechnologyLayer (electronics)Metal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchHigh-Temperature Coating Behaviors