A novel green waterless and oilless chemical mechanical polishing for soft-brittle, temperature-sensitive and deliquescent potassium dihydrogen phosphate
Yubiao Li, Zhenyu Zhang, Jianjun Yang, Zheng Ren, Shuming Zhao
Topics & Concepts
Materials sciencePolishingTartaric acidTriethanolamineSurface roughnessChemical engineeringChemical-mechanical planarizationComposite materialAnalytical Chemistry (journal)Organic chemistryChemistryEngineeringCitric acidAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchLaser Material Processing Techniques