Effect of epitaxial growth rate on morphological, structural and optical properties of β-Ga2O3 films prepared by MOCVD
Di Wang, Xiaochen Ma, Hongdi Xiao, Rongrong Chen, Yong Le, Caìna Luan, Biao Zhang, Jin Ma
Topics & Concepts
EpitaxyMaterials scienceMetalorganic vapour phase epitaxyBand gapMonoclinic crystal systemChemical vapor depositionGrowth rateThin filmTransmittanceCrystallographyRefractive indexAnalytical Chemistry (journal)NanotechnologyOptoelectronicsChemistryCrystal structureLayer (electronics)MathematicsChromatographyGeometryGa2O3 and related materialsZnO doping and propertiesAdvanced Photocatalysis Techniques