Imec silicon photonics platforms: performance overview and roadmap
Filippo Ferraro, Peter De Heyn, Min Kyu Kim, Natarajan Rajasekaran, Mathias Berciano, Grigorij Muliuk, Dieter Bode, Guy Lepage, Sofie Janssen, Rafal Magdziak, Jeroen De Coster, Hakim Kobbi, S. Lardenois, Negin Golshani, Leili Shiramin, Chiara Marchese, Selva Rajmohan, Shankr Nadarajan, Neha Singh, Sumi Radhakrishnan, Artemisia Tsiara, Pengfei Xu, Ayze Karagoz, Didit Yudistira, M. Martire, Abdul H. Shahar, Maumita Chakrabarti, Dimitrios Velenis, Wei Guo, Andy Miller, Kristof Croes, Sadhishkumar Balakrishnan, Peter Verheyen, Yoojin Ban, Joris Van Campenhout, P. Absil
Abstract
Silicon photonics is now considered the photonics platform of choice for short-reach data center single mode pluggable transceivers. With the emergence of co-packaged optics concepts, it can also enable high performance computing with power-efficient interconnect, but also Lidar system integration or even optical quantum computing. In this paper we will present an overview of what can be achieved in state-of-the-art silicon photonics platforms and we will discuss some of the emerging technology trends. In particular, we will discuss the integration of LPCVD SiN in an active silicon photonics platform.