Atomic layer deposition
W. M. M. Kessels, Anjana Devi, Jin‐Seong Park, Mikko Ritala, Ángel Yanguas-Gil, Claudia Wiemer
Topics & Concepts
Atomic layer depositionDeposition (geology)NanotechnologyMaterials scienceLayer (electronics)Atomic layer epitaxyThin filmChemical vapor depositionCharacterization (materials science)Vacuum depositionInterface (matter)Layer by layerAtomic unitsPhysical vapor depositionEngineering physicsSubstrate (aquarium)Vapour depositionOptoelectronicsComputer scienceChemical engineeringRange (aeronautics)Surface modificationReproducibilitySemiconductor materials and devicesElectronic and Structural Properties of OxidesAdvancements in Semiconductor Devices and Circuit Design