Machine learning aided solution to the inverse problem in optical scatterometry
Shuo Liu, Xiuguo Chen, Tianjuan Yang, Chunfu Guo, Jiahao Zhang, Jianyuan Ma, Chao Chen, Cai Wang, Chuanwei Zhang, Shiyuan Liu
Topics & Concepts
Robustness (evolution)Dimensionality reductionSolverComputer scienceArtificial neural networkInverse problemCurse of dimensionalitySemiconductor device fabricationArtificial intelligenceMachine learningEngineeringMathematicsGeneProgramming languageWaferChemistryMathematical analysisBiochemistryElectrical engineeringOptical Coatings and GratingsNear-Field Optical MicroscopySurface Roughness and Optical Measurements