Growth and annealing effect on the Cu thin film deposited on Si (0 0 1) surface
H. Mes-adi, K. Saadouni, Michaël Badawi, M. Mazroui, Sébastien Lebègue∥
Topics & Concepts
Annealing (glass)Thin filmMaterials scienceMetallurgyMineralogyAnalytical Chemistry (journal)ChemistryNanotechnologyChromatographyCopper Interconnects and ReliabilitySurface and Thin Film PhenomenaSemiconductor materials and devices