3D nanolithography with metalens arrays and spatially adaptive illumination
Songyun Gu, Chenkai Mao, Anna Güell Izard, Sarvesh A. Sadana, Dongping Terrel‐Perez, Magi Mettry, Won Jin Choi, Wenjie Zhou, Hujie Yan, Ziran Zhou, Travis L. Massey, Alex Abelson, You Zhou, Sijia Huang, Chiara Daraio, T. U. Tumkur, Jonathan A. Fan, Xiaoxing Xia
Topics & Concepts
NanolithographyPhotonicsLithographyMaterials scienceOpticsSpatial light modulatorMicrolensNanomanufacturingImage stitchingLaserNanotechnologyOptoelectronicsFocal lengthPhotolithographyCardinal pointComputer scienceLaser linewidth3D printingFabricationMetrologyHolographyNanophotonicsLaser scanningStereolithographyLaser ablationNext-generation lithographyMicrocontact printingAdaptive opticsPhotonic crystalStructured lightNonlinear Optical Materials StudiesNanofabrication and Lithography TechniquesLaser Material Processing Techniques