Orbitrap™-SIMS analysis of advanced semiconductor inorganic structures
Alexis Franquet, Valentina Spampinato, Sven Kayser, Wilfried Vandervorst, Paul van der Heide
Topics & Concepts
OrbitrapSecondary ion mass spectrometryContext (archaeology)Characterization (materials science)Analytical Chemistry (journal)DopantResolution (logic)ChemistryStatic secondary-ion mass spectrometryMass spectrometrySpectrum analyzerImpurityIonSemiconductorMaterials scienceOptoelectronicsNanotechnologyDopingOpticsPhysicsComputer scienceChromatographyBiologyArtificial intelligencePaleontologyOrganic chemistryIon-surface interactions and analysisIntegrated Circuits and Semiconductor Failure AnalysisDiamond and Carbon-based Materials Research