Antiferroelectric titanium-doped zirconia thin films deposited via HiPIMS for highly efficient electrocaloric applications
Yuhua Liu, Po-Chun Wang, Li-Hsiang Lin, Jer‐Chyi Wang
Topics & Concepts
Materials scienceHigh-power impulse magnetron sputteringThin filmCrystallinityCubic zirconiaComposite materialSputter depositionOptoelectronicsSputteringNanotechnologyCeramicFerroelectric and Negative Capacitance DevicesFerroelectric and Piezoelectric MaterialsSemiconductor materials and devices