Transparent SiN thin-film anode for thin-film batteries by reactive sputtering at room temperature
Hyunseok Lee, Kwang‐Bum Kim, Ji‐Won Choi
Topics & Concepts
Materials scienceSputteringThin filmAnodeX-ray photoelectron spectroscopyTransmittanceSubstrate (aquarium)OptoelectronicsSputter depositionSiliconElectrodeNanotechnologyChemical engineeringChemistryPhysical chemistryOceanographyGeologyEngineeringAdvancements in Battery MaterialsSupercapacitor Materials and FabricationAdvanced Battery Materials and Technologies