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The influence of lightly doped p-GaN cap layer on p-GaN/AlGaN/GaN HEMT

Kai Liu, Runhao Wang, Chong Wang, Xuefeng Zheng, Xiaohua Ma, Junchun Bai, Bin Cheng, Ruiyu Liu, Ang Li, Yaopeng Zhao, Yue Hao

2022Semiconductor Science and Technology25 citationsDOI

Abstract

Abstract In this paper, the influence of a lightly doped p-GaN (p − -GaN) cap layer on p-GaN/AlGaN/GaN high electron mobility transistors (HEMTs) (LDP-HEMTs) was investigated. No difference in output or off-state breakdown characteristics was observed, but there was a negative shift in threshold voltage ( V TH ). The gate leakage ( V GS = 7 V) dropped by three orders of magnitude, and the gate forward breakdown voltage and continuous operating voltage increased by 6.5 V and 2.5 V, respectively. It is worth noting that the gate characteristics are significantly optimized, which is ascribed to the employment of the p − -GaN cap layer. The simulations illustrate that the electric field is dispersed, and the electric peak is alleviated by the p − -GaN cap layer, thus suppressing the impact ionization and carrier injection in the high electric field. Furthermore, there is a negligible effect on the temperature reliability of V TH based on the temperature-dependent characteristics in LDP-HEMTs. However, the temperature stability of the gate current ( V GS = 7 V) will worsen in LDP-HEMTs due to the difference in the conduction mechanism, compared with conventional p-GaN HEMTs.

Topics & Concepts

High-electron-mobility transistorMaterials scienceOptoelectronicsDopingBreakdown voltageElectric fieldGallium nitrideThreshold voltageBarrier layerTransistorWide-bandgap semiconductorLayer (electronics)VoltageElectrical engineeringNanotechnologyPhysicsQuantum mechanicsEngineeringGaN-based semiconductor devices and materialsGa2O3 and related materialsSilicon Carbide Semiconductor Technologies