A high-resolution area-change-based capacitive MEMS tilt sensor
K. S. Prakasa Rao, Huafeng Liu, Xiaoli Wei, Wenjie Wu, Chenyuan Hu, Ji Fan, Jinquan Liu, Liangcheng Tu
Topics & Concepts
Microelectromechanical systemsCapacitive sensingTilt sensorAccelerometerTilt (camera)MiniaturizationCapacitanceElectrical engineeringElectronic engineeringNoise floorSensitivity (control systems)Materials scienceEngineeringAcousticsOptoelectronicsComputer scienceNoise reductionNoise measurementElectrodeOperating systemOptical fiberMechanical engineeringPhysicsChemistryPhysical chemistryTelecommunicationsAdvanced MEMS and NEMS TechnologiesGeophysics and Sensor TechnologyAdvanced Fiber Optic Sensors