Ru doped aluminum nitride monolayer for detecting and scavenging SF6 decomposition components
Qichao Li, Di Chen, Yamin Liu, Jianmin Miao, Chunlei Zhang, Xianping Chen, Daxiang Cui
Topics & Concepts
MonolayerMaterials scienceAdsorptionDecompositionDopingNitrideChemical physicsNanotechnologyPhysical chemistryOptoelectronicsChemistryLayer (electronics)Organic chemistryGa2O3 and related materialsMetal and Thin Film MechanicsGaN-based semiconductor devices and materials