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Effect of annealing temperature in nitrogen atmosphere and under vacuum on structural, optical and electrical properties of sputtered ITO/Ni/ITO multilayer

Abdelali Agdad, Abdelaziz Tchenka, M. Chaik, Salma Kaotar Hnawi, Mustapha Azizan, E. Ech‐chamikh, Y. Ijdiyaou

2022Applied Physics A14 citationsDOI

Topics & Concepts

Annealing (glass)Materials scienceElectrical resistivity and conductivitySputteringNitrogenTransmittanceThin filmFigure of meritAnalytical Chemistry (journal)Ultra-high vacuumForming gasComposite materialOptoelectronicsChemistryNanotechnologyElectrical engineeringEngineeringOrganic chemistryChromatographyZnO doping and propertiesGas Sensing Nanomaterials and SensorsElectronic and Structural Properties of Oxides
Effect of annealing temperature in nitrogen atmosphere and under vacuum on structural, optical and electrical properties of sputtered ITO/Ni/ITO multilayer | Litcius