Improvement of high entropy alloy nitride coatings (AlCrNbSiTiMo)N on mechanical and high temperature tribological properties by tuning substrate bias
Wei-Li Lo, Sheng-Yu Hsu, Yu-Chia Lin, Su-Yueh Tsai, Yuan‐Tai Lai, Jenq-Gong Duh
Topics & Concepts
Materials scienceTribologySputter depositionResidual stressComposite materialNitrideCoatingAlloySubstrate (aquarium)MetallurgySputteringThin filmLayer (electronics)NanotechnologyOceanographyGeologyMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchHigh Entropy Alloys Studies