Litcius/Paper detail

Role of mechanically-driven distorted microstructure in mechanochemical removal of silicon

Chen Xiao, Jie Li, Jian Guo, Peng Zhang, Bingjun Yu, Lei Chen, Linmao Qian

2020Applied Surface Science15 citationsDOI

Topics & Concepts

NanomanufacturingMaterials scienceSiliconMechanochemistryMicrostructureAtomic unitsOxideNanotechnologyGroove (engineering)Amorphous solidChemical physicsComposite materialMetallurgyCrystallographyChemistryQuantum mechanicsPhysicsAdvanced Surface Polishing TechniquesForce Microscopy Techniques and ApplicationsDiamond and Carbon-based Materials Research