Effects of sputtering pressure and oxygen partial pressure on amorphous Ga2O3 film-based solar-blind ultraviolet photodetectors
Keyun Gu, Zilong Zhang, Ke Tang, Jian Huang, Meiyong Liao, Linjun Wang
Topics & Concepts
ResponsivityPhotodetectionPhotodetectorSputteringMaterials scienceOptoelectronicsAmorphous solidUltravioletPartial pressureQuantum efficiencyOxygenThin filmNanotechnologyChemistryOrganic chemistryGa2O3 and related materialsZnO doping and propertiesAdvanced Photocatalysis Techniques