Effect of C2H2 flow rate and a Ti/TiN/TiCN interlayer on the structure, mechanical and tribological properties of a-C:H films deposited using a hybrid PVD/PECVD process with an anode-layer ion source
SU Zhi-jun, Xiaohua Jie, Wenfang Li, Zhongmiao Liao, Yingchun Li, Wen Zhu
Topics & Concepts
Materials scienceX-ray photoelectron spectroscopyPlasma-enhanced chemical vapor depositionTinRaman spectroscopyNanoindentationHigh-power impulse magnetron sputteringSputter depositionScanning electron microscopePhysical vapor depositionTribologyChemical vapor depositionComposite materialIon platingAnalytical Chemistry (journal)SputteringThin filmMetallurgyChemical engineeringNanotechnologyChemistryChromatographyEngineeringOpticsPhysicsDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsAdvanced materials and composites