Diamond-like/graphite-like carbon composite films deposited by high-power impulse magnetron sputtering
Xu Li, Wei Dai, Qimin Wang, Yunpeng Liang, Zhengtao Wu
Topics & Concepts
High-power impulse magnetron sputteringMaterials scienceTribometerComposite materialSputter depositionNanoindentationDiamond-like carbonComposite numberMicrostructureSputteringGraphiteTribologyRaman spectroscopyResidual stressThin filmNanotechnologyOpticsPhysicsDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsTribology and Wear Analysis