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A squared bossed diaphragm piezoresistive pressure sensor based on CNTs for low pressure range with enhanced sensitivity

Rekha Devi, Sandeep Singh Gill

2021Microsystem Technologies29 citationsDOI

Topics & Concepts

Piezoresistive effectDiaphragm (acoustics)Materials scienceResistorPressure sensorSensitivity (control systems)LinearityMicroelectromechanical systemsCarbon nanotubePressure measurementOptoelectronicsAcousticsElectrical engineeringComposite materialElectronic engineeringVibrationMechanical engineeringEngineeringVoltagePhysicsAdvanced MEMS and NEMS TechnologiesMechanical and Optical ResonatorsAdvanced Sensor and Energy Harvesting Materials
A squared bossed diaphragm piezoresistive pressure sensor based on CNTs for low pressure range with enhanced sensitivity | Litcius