A squared bossed diaphragm piezoresistive pressure sensor based on CNTs for low pressure range with enhanced sensitivity
Rekha Devi, Sandeep Singh Gill
Topics & Concepts
Piezoresistive effectDiaphragm (acoustics)Materials scienceResistorPressure sensorSensitivity (control systems)LinearityMicroelectromechanical systemsCarbon nanotubePressure measurementOptoelectronicsAcousticsElectrical engineeringComposite materialElectronic engineeringVibrationMechanical engineeringEngineeringVoltagePhysicsAdvanced MEMS and NEMS TechnologiesMechanical and Optical ResonatorsAdvanced Sensor and Energy Harvesting Materials