Structural properties of TiN thin films prepared by RF reactive magnetron sputtering
R. Dhanaraj, S. Beer Mohamed, M. Kamruddin, K. Kaviyarasu, Palnati Manojkumar
Topics & Concepts
Materials scienceAmorphous solidThin filmSputter depositionCrystallinitySputteringTinRaman spectroscopyTitanium nitrideAnalytical Chemistry (journal)NitrideLayer (electronics)Composite materialOpticsNanotechnologyCrystallographyMetallurgyChemistryChromatographyPhysicsMetal and Thin Film MechanicsGaN-based semiconductor devices and materialsZnO doping and properties