Spectral characteristics of laser-induced plasma generated on porous silicon produced by metal-assisted etching
Yusuke Shimazu, Ayumu Matsumoto, Sachiyo Hirai, Haruka Nakano, Kosuke Suzuki, Shinji Yae
Topics & Concepts
Porous siliconMaterials scienceSiliconEtching (microfabrication)PlasmaSubstrate (aquarium)Laser-induced breakdown spectroscopyPorosityLaserAnalytical Chemistry (journal)SpectroscopyMetalNanotechnologyChemistryOptoelectronicsOpticsComposite materialMetallurgyGeologyQuantum mechanicsOceanographyPhysicsLayer (electronics)ChromatographyLaser-induced spectroscopy and plasmaIon-surface interactions and analysisAnalytical chemistry methods development