Micro-scale contact behavior and its effect on the material removal process during chemical mechanical polishing
Lin Wang, Ping Zhou, Ying Yan, Changyu Hou, Dongming Guo
Topics & Concepts
WavinessAsperity (geotechnical engineering)Materials sciencePolishingFriction coefficientSlip (aerodynamics)Composite materialMicroscopic scaleMechanicsSurface finishDynamical frictionForensic engineeringOpticsThermodynamicsEngineeringPhysicsAdvanced Surface Polishing TechniquesAdvanced machining processes and optimizationAdhesion, Friction, and Surface Interactions