Fabrication and properties of N-doped top layer of Ga2O3 films by magnetron sputtering
Ning Zhang, Yongsheng Wang, Zihao Chen, Bin Zhou, Jie Gao, Yanxia Wu, Yong Ma, Hongjun Hei, Shengwang Yu
Topics & Concepts
Materials scienceX-ray photoelectron spectroscopySputter depositionDopingBand gapAnnealing (glass)SputteringTransmittanceAnalytical Chemistry (journal)Thin filmSurface roughnessOptoelectronicsUltravioletNanotechnologyMetallurgyComposite materialChemistryChemical engineeringChromatographyEngineeringGa2O3 and related materialsZnO doping and propertiesAdvanced Photocatalysis Techniques