Area selective deposition for bottom-up atomic-scale manufacturing
Rong Chen, Eryan Gu, Kun Cao, Jingming Zhang
Topics & Concepts
Atomic unitsDeposition (geology)Atomic layer depositionScale (ratio)Materials scienceNanotechnologyEnvironmental scienceGeologyPhysicsThin filmPaleontologySedimentQuantum mechanicsSemiconductor materials and devicesElectronic and Structural Properties of OxidesIntegrated Circuits and Semiconductor Failure Analysis