Litcius/Paper detail

Optimization and characterization of direct UV laser writing system for microscale applications

Sangam Srikanth, Sohan Dudala, Sushil Raut, Satish Kumar Dubey, Idaku Ishii, Arshad Javed, Sanket Goel

2020Journal of Micromechanics and Microengineering40 citationsDOI

Abstract

Optimization and characterization of direct UV laser writing system for microscale applications, Srikanth, Sangam, Dudala, Sohan, Raut, Sushil, Dubey, Satish Kumar, Ishii, Idaku, Javed, Arshad, Goel, Sanket

Topics & Concepts

Microscale chemistryLaserMaterials scienceDesign of experimentsOpticsFocus (optics)PhotoresistIntensity (physics)Computer scienceMathematicsNanotechnologyStatisticsPhysicsMathematics educationLayer (electronics)Innovative Microfluidic and Catalytic Techniques InnovationNanofabrication and Lithography TechniquesMicrofluidic and Capillary Electrophoresis Applications