Improving the accuracy of TIF in bonnet polishing based on Gaussian process regression
Jingbo Feng, Yifan Zhang, Shuo Lin, Yuehong Yin
Topics & Concepts
PolishingKrigingProcess (computing)Gaussian processRegressionGaussianIndustrial and production engineeringRegression analysisComputer scienceEngineeringStatisticsMathematicsMechanical engineeringPhysicsQuantum mechanicsOperating systemAdvanced Surface Polishing TechniquesIntegrated Circuits and Semiconductor Failure AnalysisAdvanced machining processes and optimization