One-step in-situ low damage etching of SiC/SiC composites by high-temperature chemical-assisted laser processing
Xi Wang, K. Zimmer, Martin Ehrhardt, Fengyun Zhang, Jin Wang, Pingping Wang, Jing Shao, Jixin Liu, Aixia Cao, Weili Sun, Shufeng Sun
Topics & Concepts
Materials scienceComposite materialIsotropic etchingEtching (microfabrication)LaserLayer (electronics)Reactive-ion etchingOpticsPhysicsAdvanced Surface Polishing TechniquesLaser Material Processing TechniquesDiamond and Carbon-based Materials Research