Plasma deposition of parylene-C film
Zhiquan Song, Ju-Hee Im, Hyuk Ko, Jun-Hee Park, Ga-Yeon Lee, Min‐Jung Kang, Moo-Hwan Kim, Jae‐Chul Pyun
Topics & Concepts
Materials scienceParyleneDeposition (geology)EvaporationThin filmCrystallinityAnalytical Chemistry (journal)Surface roughnessPlasmaPolymerNanotechnologyComposite materialOrganic chemistryChemistryPhysicsBiologyQuantum mechanicsSedimentPaleontologyThermodynamicsNeuroscience and Neural EngineeringSemiconductor materials and devicesForce Microscopy Techniques and Applications