A physics-informed Run-to-Run control framework for semiconductor manufacturing
Wei-Ting Yang, Jakey Blue, Agnès Roussy, Jacques Pinaton, Marco S. Reis
Topics & Concepts
Computer scienceProcess (computing)Semiconductor device fabricationKey (lock)Controller (irrigation)Control engineeringDynamic Bayesian networkMachine learningIndustrial engineeringArtificial intelligenceReliability engineeringBayesian probabilityEngineeringWaferComputer securityBiologyElectrical engineeringAgronomyOperating systemIndustrial Vision Systems and Defect DetectionFault Detection and Control SystemsAdvanced Statistical Process Monitoring