Effect of substrate bias voltage on the mechanical properties of AlTiN/CrTiSiN multilayer hard coatings
Yin‐Yu Chang, L.T Chao
Topics & Concepts
Materials scienceResidual stressCoatingComposite materialSubstrate (aquarium)BiasingDeposition (geology)VoltageElectrical engineeringSedimentOceanographyBiologyPaleontologyEngineeringGeologyMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchBoron and Carbon Nanomaterials Research