Large-field step-structure surface measurement using a femtosecond laser
Yue Wang, Guangyao Xu, Shilin Xiong, Guanhao Wu
Abstract
We present a femtosecond laser-based interferometry for step-structure surface measurement with a large field of view. A height axial scanning range of 348 µm is achieved by using the method of repetition frequency scanning with reference to the Rb atomic clock and the optical path length difference design for 21 times of the pulse interval. A combined method, which includes the envelope peak positioning method for rough measurement, synthetic-wavelength interferometry for connection, and carrier wave interferometry for fine measurement, is proposed to reconstruct the surface. A three-step specimen with heights of approximately 20, 50, and 70 µm was successfully measured with a height precision of 7 nm, and the accuracy was verified by a commercial white light interferometer. The diameter of the field of view that was demonstrated was 17.3 mm, which could be much larger owing to the high spatial coherence of the femtosecond laser. The results show that the femtosecond laser system combines the step-structure measurement performance of white light interferometry and the high-precision large-field performance of phase shifting interferometry, indicating its potential for widespread use in ultra-precision manufacturing of micro/nano-devices, such as semiconductor chips, integrated circuits, and micro-electro-mechanical systems.