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Silicon Sensors and Actuators

Benedetto Vigna, Paolo Ferrari, Flavio Francesco Villa, E. Lasalandra, Sarah Zerbini

202237 citationsDOI

Topics & Concepts

Silicon valleyActuatorSiliconEngineeringTransducerNanotechnologyComputer scienceEngineering physicsMaterials scienceElectrical engineeringBusinessOptoelectronicsEntrepreneurshipFinanceAdvanced MEMS and NEMS Technologies
Silicon Sensors and Actuators | Litcius