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A Resonant Lorentz-Force Magnetometer Exploiting Blue Sideband Actuation to Enhance Sensitivity and Resolution

Yuan Wang, Xiaoxiao Song, Jingqian Xi, Fangzheng Li, Lei Xu, Huafeng Liu, Chen Wang, Shuangyang Kuang, Liangcheng Tu, Michaël Kraft, Chun Zhao

2022Journal of Microelectromechanical Systems15 citationsDOI

Abstract

This paper reports a miniaturized resonant Lorentz-force magnetometer that exploits blue-sideband actuation to attain a better sensitivity and resolution. The resonant magnetometer consists of a double-ended tuning fork (DETF) resonator with cavity slots to optimize thermoelastic dissipation, as well as a Lorentz-force generator structure to transduce the magnetic force to the axial of the resonator. The proposed device demonstrates a Lorentz-force sensitivity of 5.5 mV/nN, a noise floor of 1.25 <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\mu \text{V}/\surd $ </tex-math></inline-formula> Hz, and a resolution of 0.23 pN/ <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\surd $ </tex-math></inline-formula> Hz. In comparison with a conventional drive scheme, the blue-sideband actuation achieves approximately two orders of magnitude improvement regarding sensitivity and resolution than that of the amplitude modulation (AM) readout and 3.6-fold enhancement than that of the frequency modulation (FM) readout. The results affirm the merit of the novel excitation method and provide solid evidence of its effectiveness in practical applications. [2022-0018]

Topics & Concepts

SidebandMagnetometerSensitivity (control systems)PhysicsLorentz forceResonatorLorentz transformationFigure of meritQuantum mechanicsOpticsElectronic engineeringMagnetic fieldEngineeringMicrowaveMechanical and Optical ResonatorsGeophysics and Sensor TechnologyAdvanced MEMS and NEMS Technologies
A Resonant Lorentz-Force Magnetometer Exploiting Blue Sideband Actuation to Enhance Sensitivity and Resolution | Litcius