Effect of bias voltage on the growth of super-hard (AlCrTiVZr)N high-entropy alloy nitride films synthesized by high power impulse magnetron sputtering
Yi Xu, Guodong Li, Guang Li, Fangyuan Gao, Xia Yuan
Topics & Concepts
High-power impulse magnetron sputteringMaterials scienceBiasingSputter depositionMicrostructureNitrideAlloyPlasmaGrain sizeAnalytical Chemistry (journal)SputteringIonComposite materialVoltageThin filmNanotechnologyChemistryElectrical engineeringPhysicsOrganic chemistryChromatographyLayer (electronics)EngineeringQuantum mechanicsMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchHigh Entropy Alloys Studies