An embedded capacitive sensor for in-situ angular detection of micromotor
Tianyu Yang, Xiaoshi Li, Xiangyu Sun, Yicheng Wang, Yu Chen, Dongdong Gong, Yijia Du
Topics & Concepts
Capacitive sensingSIGNAL (programming language)PlanarAcousticsElectromagnetic shieldingDetection theoryUltrasonic sensorElectronic engineeringMaterials scienceEngineeringElectrical engineeringPhysicsComputer scienceDetectorProgramming languageComputer graphics (images)Advanced MEMS and NEMS TechnologiesAcoustic Wave Resonator TechnologiesPiezoelectric Actuators and Control