Piezoelectric pressure sensor based on flexible gallium nitride thin film for harsh-environment and high-temperature applications
Nam‐In Kim, Yu-Li Chang, Jie Chen, T.W. Jr. Barbee, Weijie Wang, Ja-Yeon Kim, Min‐Ki Kwon, Shahab Shervin, Mina Moradnia, Sara Pouladi, Devendra Khatiwada, V. Selvamanickam, Jae‐Hyun Ryou
Topics & Concepts
Materials scienceLead zirconate titanatePiezoelectricityPressure sensorOptoelectronicsGalliumPiezoelectric sensorGallium nitrideCeramicSilicon nitrideSubstrate (aquarium)Piezoelectric coefficientThin filmNitrideComposite materialSiliconLayer (electronics)FerroelectricityNanotechnologyMetallurgyMechanical engineeringDielectricEngineeringGeologyOceanographyAdvanced Sensor and Energy Harvesting MaterialsAcoustic Wave Resonator TechnologiesGas Sensing Nanomaterials and Sensors