Ferroelectric enhancement of Al-doped HfO2 thin films by rapid electron beam annealing in a low thermal budget
Ting‐Yun Wang, Wei-Chung Kao, Yu‐Tung Yin, Jay Shieh, Miin‐Jang Chen
Topics & Concepts
FerroelectricityMaterials scienceDopingOrthorhombic crystal systemAnnealing (glass)DiffractionThin filmElectron diffractionElectronAnalytical Chemistry (journal)OpticsOptoelectronicsNanotechnologyComposite materialDielectricChemistryChromatographyQuantum mechanicsPhysicsFerroelectric and Negative Capacitance DevicesSemiconductor materials and devicesElectronic and Structural Properties of Oxides