Electrical characterization of thin silicon-on-insulator films doped by means of phosphorus end-terminated polymers
Andrea Pulici, Stefano Kuschlan, Gabriele Seguini, Fabiana Taglietti, M. Fanciulli, Riccardo Chiarcos, Michele Laus, Michele Perego
Topics & Concepts
Materials scienceDopantVan der Pauw methodAnalytical Chemistry (journal)Annealing (glass)DopingSecondary ion mass spectrometrySiliconSheet resistanceElectrical resistivity and conductivityOptoelectronicsHall effectLayer (electronics)NanotechnologyIonComposite materialElectrical engineeringChemistryOrganic chemistryEngineeringSemiconductor materials and devicesAdvancements in Semiconductor Devices and Circuit DesignNanowire Synthesis and Applications