Study on the surface interaction mechanism, corrosion inhibition effect and the synergistic action of potassium oleate and fatty alcohol polyoxy ethylene ether on copper film chemical mechanical polishing for giant large scale integrated circuit
Han Yan, Yinchan Zhang, Xinhuan Niu, Jianchao Wang, Chenghui Yang, Fu Luo, Minghui Qu, Yunhui Shi, Ru Wang
Topics & Concepts
ChemistryPolishingCopperChemical-mechanical planarizationCorrosionFatty alcoholElectrochemistryChemical engineeringPulmonary surfactantLayer (electronics)Inorganic chemistryMetallurgyMaterials scienceOrganic chemistryPhysical chemistryBiochemistryEngineeringElectrodeAdvanced Surface Polishing TechniquesElectrodeposition and Electroless CoatingsCorrosion Behavior and Inhibition