High figure-of-merit in Al-doped ZnO thin films grown by ALD through the Al content adjustment
Quang Chieu Bui, Vincent Consonni, Sarah Boubenia, Guillaume Gay, Corinne Perret, Mohammed Zeghouane, S. Labau, Hervé Roussel, Xavier Mescot, Gustavo Ardila, B. Salem
Topics & Concepts
Materials scienceAtomic layer depositionThin filmFigure of meritOptoelectronicsDopantDopingDiethylzincSubstrate (aquarium)TransmittanceTransparent conducting filmFabricationAluminiumPhotovoltaicsNanotechnologyComposite materialEcologyMedicineCatalysisGeologyAlternative medicinePhotovoltaic systemEnantioselective synthesisOceanographyPathologyChemistryBiochemistryBiologyZnO doping and propertiesSemiconductor materials and devicesGas Sensing Nanomaterials and Sensors