Organotin bearing polymeric resists for electron beam lithography
Midathala Yogesh, Mohamad G. Moinuddin, Lalit D. Khillare, Srinivas Chinthalapalli, Satinder K. Sharma, Subrata Ghosh, Kenneth E. Gonsalves
Topics & Concepts
ResistMaterials scienceThermogravimetric analysisX-ray photoelectron spectroscopyElectron-beam lithographyMethacrylateFourier transform infrared spectroscopyThermal stabilityPolymerPhotoresistScanning electron microscopeAnalytical Chemistry (journal)PolymerizationPolymer chemistryChemical engineeringNanotechnologyChemistryComposite materialOrganic chemistryLayer (electronics)EngineeringAdvancements in Photolithography TechniquesNanofabrication and Lithography TechniquesAdvanced Surface Polishing Techniques