Materials Selection Approaches and Fabrication Methods in RF MEMS Switches
Kurmendra Kurmendra, Rajesh Kumar
Topics & Concepts
Microelectromechanical systemsFabricationSelection (genetic algorithm)Solid-state physicsMaterials scienceNanotechnologyComputer scienceOptoelectronicsElectronic engineeringEngineeringPhysicsArtificial intelligenceMedicinePathologyCondensed matter physicsAlternative medicineAdvanced MEMS and NEMS Technologies3D IC and TSV technologiesAdvanced Surface Polishing Techniques