Litcius/Paper detail

Materials Selection Approaches and Fabrication Methods in RF MEMS Switches

Kurmendra Kurmendra, Rajesh Kumar

2021Journal of Electronic Materials26 citationsDOI

Topics & Concepts

Microelectromechanical systemsFabricationSelection (genetic algorithm)Solid-state physicsMaterials scienceNanotechnologyComputer scienceOptoelectronicsElectronic engineeringEngineeringPhysicsArtificial intelligenceMedicinePathologyCondensed matter physicsAlternative medicineAdvanced MEMS and NEMS Technologies3D IC and TSV technologiesAdvanced Surface Polishing Techniques
Materials Selection Approaches and Fabrication Methods in RF MEMS Switches | Litcius