FIB-DIC ring-core measurement of the residual stress on HiPIMS W/Cu and Cr/Cu multilayer thin films
Zhen-Yi Zeng, Tra Anh Khoa Nguyen, Nhat Minh Dang, Xiu-Wei Wu, Terry Yuan-Feng Chen, Ming-Tzer Lin
Topics & Concepts
Residual stressMaterials scienceThin filmHigh-power impulse magnetron sputteringComposite materialStress (linguistics)Sputter depositionMetallurgySputteringNanotechnologyPhilosophyLinguisticsMetal and Thin Film MechanicsAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials Research