Influence of sputtering conditions on the properties of aluminum-doped zinc oxide thin film fabricated using a facing target sputtering system
Moonyoung Lee, Yong‐Seo Park, Kyunghwan Kim, Jeongsoo Hong
Topics & Concepts
SputteringCrystallinityMaterials scienceZincThin filmDopingTransmittanceSubstrate (aquarium)Electrical resistivity and conductivityAluminiumOxideOptoelectronicsAnalytical Chemistry (journal)MetallurgyComposite materialMineralogyNanotechnologyChemistryChromatographyElectrical engineeringEngineeringGeologyOceanographyZnO doping and propertiesGas Sensing Nanomaterials and SensorsGa2O3 and related materials