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Influence of nitrogen gas over microstructural, vibrational and mechanical properties of CVD Titanium nitride (TiN) thin film coating

Soham Das, Spandan Guha, Ranjan Kumar Ghadai, Ashis Sharma

2021Ceramics International58 citationsDOI

Topics & Concepts

Materials scienceTitanium nitrideTinCrystalliteMicrostructureCoatingThin filmVolumetric flow rateSubstrate (aquarium)Composite materialTitaniumChemical vapor depositionSurface roughnessNitrideMetallurgyLayer (electronics)NanotechnologyOceanographyGeologyPhysicsQuantum mechanicsMetal and Thin Film MechanicsSemiconductor materials and devicesDiamond and Carbon-based Materials Research
Influence of nitrogen gas over microstructural, vibrational and mechanical properties of CVD Titanium nitride (TiN) thin film coating | Litcius