Influence of nitrogen gas over microstructural, vibrational and mechanical properties of CVD Titanium nitride (TiN) thin film coating
Soham Das, Spandan Guha, Ranjan Kumar Ghadai, Ashis Sharma
Topics & Concepts
Materials scienceTitanium nitrideTinCrystalliteMicrostructureCoatingThin filmVolumetric flow rateSubstrate (aquarium)Composite materialTitaniumChemical vapor depositionSurface roughnessNitrideMetallurgyLayer (electronics)NanotechnologyOceanographyGeologyPhysicsQuantum mechanicsMetal and Thin Film MechanicsSemiconductor materials and devicesDiamond and Carbon-based Materials Research